Semiconductor Switching Device Separate by Device Isolation

ABSTRACT

A device including a gate structure formed over a semiconductor substrate, the gate structure having extensions, a device isolation structure formed into the semiconductor substrate adjacent the gate structure, wherein the extensions are over a portion of the device isolation structure, and source/drain regions on both sides of the gate structure, the source/drain regions being formed in a gap in the device isolation structure and being partially enclosed by the extensions of the gate structure.

PRIORITY DATA

The present application is a continuation application of U.S.application Ser. No. 16/672,723, filed Nov. 4, 2019, which is acontinuation application of U.S. application Ser. No. 16/199,289, filedNov. 26, 2018, which is a continuation application of U.S. applicationSer. No. 15/645,039, filed Jul. 10, 2017, which is a continuationapplication of U.S. application Ser. No. 15/075,880, filed Mar. 21,2016, which is a divisional application of U.S. application Ser. No.13/951,626, filed Jul. 26, 2013, each of which is hereby incorporated byreference in its entirety.

BACKGROUND

Photo-sensitive devices are used in a variety of electronic devices. Forexample, an array of photo-sensitive devices can be used to form animage sensor array to be used in a digital camera. A photo-sensitivedevice typically includes an active region within a semiconductormaterial that transfers energy from photons into electrical energy.

Each cell within a photo-sensitive device array includes the mainphoto-sensitive device as well as some circuit components such astransistors and resistors that are used to measure the electric currentproduced by the photo-sensitive device. It is important that thesecircuit components are isolated from the photo-sensitive region becausestray electric current can cause dark currents within thephoto-sensitive region. This adversely affects the light intensitymeasurements performed by the photo-sensitive region.

One way to isolate the device structures is to use shallow trenchisolation. Shallow trench isolation is a common technique used insemiconductor fabrication and involves the formation of a shallow trenchthat is then filled with a dielectric material. This technique, however,involves plasma etching which can damage the surface of the substrate.This can adversely affect the performance of the photo-sensitive array.

Another method of isolation is a technique referred to as deviceisolation. This technique involves the formation of a dopedsemiconductor material instead of a dielectric material. The dopedsemiconductor material is of a different concentration than the dopingconcentration of adjacent semiconductor materials, thus forming ajunction. However, this technique is less effective when isolatingsource/drain regions from photo-sensitive devices. Thus, it is desirableto find a method of isolation that effectively protects thephoto-sensitive devices without causing damage to the surface of thesubstrate.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isemphasized that, in accordance with the standard practice in theindustry, various features are not drawn to scale. In fact, thedimensions of the various features may be arbitrarily increased orreduced for clarity of discussion.

FIG. 1 is a diagram showing an illustrative top view of an array ofphoto-sensitive devices, according to one example of principlesdescribed herein.

FIGS. 2A-2D are diagrams showing top and side views of a process forforming a transistor structure separated from photo-sensitive devices bydevice isolation, according to one example of principles describedherein.

FIG. 3 is a diagram showing further extensions of an I-shaped gatestructure, according to one example of principles described herein.

FIG. 4 is a diagram showing an illustrative dummy gate structure,according to one example of principles described herein.

FIG. 5 is a flowchart showing an illustrative method for forming atransistor structure separated by device isolation, according to oneexample of principles described herein.

DETAILED DESCRIPTION

It is to be understood that the following disclosure provides manydifferent embodiments, or examples, for implementing different featuresof the disclosure. Specific examples of components and arrangements aredescribed below to simplify the present disclosure. These are, ofcourse, merely examples and are not intended to be limiting. Moreover,the performance of a first process before a second process in thedescription that follows may include embodiments in which the secondprocess is performed immediately after the first process, and may alsoinclude embodiments in which additional processes may be performedbetween the first and second processes. Various features may bearbitrarily drawn in different scales for the sake of simplicity andclarity. Furthermore, the formation of a first feature over or on asecond feature in the description that follows may include embodimentsin which the first and second features are formed in direct contact, andmay also include embodiments in which additional features may be formedbetween the first and second features, such that the first and secondfeatures may not be in direct contact.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. For example, if the device in the figures is turned over,elements described as being “below” or “beneath” other elements orfeatures would then be oriented “above” the other elements or features.Thus, the exemplary term “below” can encompass both an orientation ofabove and below. The apparatus may be otherwise oriented (rotated 90degrees or at other orientations) and the spatially relative descriptorsused herein may likewise be interpreted accordingly.

FIG. 1 is a diagram showing an illustrative top view of an array 100 ofphoto-sensitive devices. According to the present example, thephoto-sensitive array 100 includes a number of photo-sensitive devicessuch as photodiodes. Each photo-sensitive device 104 is associated witha set of circuitry 106.

Photodiodes 104 are commonly used in image sensor arrays to measure theintensity of light. Photodiodes 104 are often formed through use of aP-I-N junction. Such a junction includes an intrinsic semiconductorregion between a p-type doped region and an n-type doped region. Duringoperations, a reverse bias is typically applied to the photodiode 104. Areverse bias is where the p-type doped region is connected to a negativeterminal and a positive terminal is connected to the n-type region.Under such conditions, the photodiode 104 can be used to create eitheran electric current or a voltage. The strength of the electric currentor voltage is based on the intensity of light impinging on the activeregion of the photodiode 104.

To appropriately bias the photodiode 104 and measure any electriccurrent or voltage being created by the photodiode in response toimpinging photons, circuitry 106 is formed onto the substrate 102adjacent to each photodiode 104. The circuitry includes a variety ofcomponents including resistors and switching devices such as Metal OxideSemiconductor Field Effect Transistors (MOSFETs). Specifically, thecircuitry may include a reset transistor, a transfer transistor, asource follower transistor, and a row select transistor. Such switchingdevices also allow for addressing a specific photodiode 104 within thearray 100.

The electric current flowing through the switches and other circuitry106 associated with each photodiode 104 can cause issues if that currentleaks into the active region of the photodiode 104. Thus, it isimportant that the circuitry 106 is effectively isolated from the activeregion of the photodiode 104. Isolation is done through use of a deviceisolation structure. Thus, a device isolation structure may refer toeither a doped region or a Shallow Trench Isolation (STI) structure. AnSTI is the formation of a dielectric material into the semiconductorsubstrate adjacent to the circuitry to be isolated.

Another isolation technique is referred to as device isolation. Deviceisolation works by doping a semiconductor substrate to define a devicerather than etching a trench and forming a dielectric material in thattrench. The doped region effectively creates a junction with the bulksubstrate material and prevents electrons from straying through. Whenforming the source/drain regions of the transistors within the circuitry106, the ion implantation doping process can result in leakage throughthe device isolation structure. This can have an adverse effect on anearby photodiode 104. Specifically it may cause dark current and whitepixel effects which will create errors in the measurement of lightimpinging on the photodiode 104.

FIGS. 2A-2D are diagrams showing top and side views of a process forforming a transistor structure separated from photo-sensitive devices bydevice isolation. The left side of each figure illustrates a top view202. The right side of each figure illustrates a cross-sectional view204. The precise cross-section that is viewed is illustrated by thedotted line 220 shown with the top view 202.

FIG. 2A illustrates the formation of the device isolation structure 208into the substrate 206. The substrate 206 may be made of a semiconductormaterial such as silicon. In some cases, the device isolation structure208 may exist everywhere except for where components are to be formed.For example, the device isolation structure 208 may be formed everywhereexcept for where the photodiodes are placed and the circuitry associatedwith those photodiodes. Thus, the transistor is formed over a gap in thedevice isolation structure 208.

As mentioned above, device isolation involves a doping of thesemiconductor substrate 206. In some cases, the substrate 206 itself maybe doped in a particular manner. In such cases, the device isolationstructure may have the same type of doping but have a much higherconcentration of doping in order to create the junction. Variousdifferent device isolation techniques may be used in accordance withprinciples described herein.

The center portion of the top view illustrates a region where atransistor is to be formed. Thus, the rectangular region of substrate206 shown in the top view 202 corresponds to where the transistor willbe placed. In the cross-sectional view 204, the middle region betweenthe two illustrated device isolation structures 208 corresponds to wherethe transistor will be placed.

FIG. 2B is a diagram showing the illustrative formation of photodiodesadjacent to the region where the transistor is to be placed. Thetransistor may be associated with circuitry that is for only one of thephotodiodes 210. It is typically desirable to have an array with thephotodiodes 210 as close to each other as possible in order to obtain ahigh resolution image. Thus, the circuitry for each photodiode 210 isoften formed directly between two adjacent photodiodes 210.

FIG. 2C illustrates the formation of a gate structure 212. Transistorstypically include three terminals: a gate terminal, a source terminal,and a drain terminal. The gate terminal is a conductive material. Thesource and drain terminals are typically doped semiconductor terminalsformed at opposing ends of the gate structure. A transistor works byeither allowing or blocking current to flow between the source terminaland the drain terminal. Depending on the type of transistor, either ahigh or low signal will put the transistor into an ON state, whereelectric current can flow between the source and drain terminal.Conversely, an opposing signal applied at the gate will put thetransistor into an OFF state, where electric current is prevented fromflowing between the source terminal and the drain terminal.

The top view 202 illustrates a standard gate structure as defined by thedotted square 222. A standard gate structure is typically rectangularfrom a top perspective. Source and drain regions are typically formed onthe opposite long sides of the rectangular gate structure.

According to the present example, the gate structure 212 includes anumber of extensions such that the gate structure forms an I-shape. Theextensions partially enclose the regions where the source/drainterminals are to be formed. These extensions help block the ionimplantation doping process used for form the source/drain regions sothat the device isolation structure is not adversely affected.Specifically, without the extensions 214 to block the ion implantationdoping process, the source/drain regions may extend too far into thedevice isolation structure. This would make it more likely that electriccurrent would stray into the active region of the photodiode and causeadverse effects such as dark current and white pixel effects.

The gate structure 212, including the extensions 214, may be made ofpolysilicon. Polysilicon is a type of silicon that can conduct electriccurrent and is thus suitable for a gate structure 212. As will bedescribed in further detail below, other gate structures of differentshapes may also be used to partially enclose the regions where thesource/drain regions are to be formed.

The cross-sectional view 204 illustrates the two extensions 214 on oneside of the gate structure 212. As illustrated, the extensions 214 maybe placed above the device isolation structures 204. The thickness ofthe extensions 214 may be based on design purposes. Specifically, thethickness of the extensions 214 may be such that the source/drainregions to be formed are effectively confined within the intended areaand do no extend into the device isolation structure 208 or otherwiseadversely affect the operation of the photodiodes 210.

FIG. 2D is a diagram illustrating the formation of sidewall spacers 216on the gate structure 212 and formation of the source/drain regions 218.Sidewall spacers 216 may be made of a variety of materials includingsilicon oxide or silicon nitride. Sidewall spacers 216 are commonly usedin semiconductor fabrication processes. Sidewall spacers 216 are used togive some space between the gate structure 212 and the formation of adoped source/drain region.

After the sidewall spacers 216 have been formed, the ion implantationdoping process can occur. This forms the source/drain regions 218 onboth sides of the main portion of the gate structure 212. Because theextensions 214 are present, the formation of the source/drain regions218 is limited to a specific area. While ion implantation is arelatively controlled process, it is not completely precise. Thus, byblocking the area encompassing the source/drain regions with extensions214 of the gate structure, the risk of performing the ion implantationprocess in an undesired location is reduced. The source/drain regionsare blocked from being formed too far into the device isolationstructures 208.

The cross-sectional view 204 illustrates the formation of one of thesource/drain regions 218 between the two extensions 214. As illustrated,the sidewall spacer 216 displaces the source/drain region 218 from beingdirectly adjacent to the extensions 214 of the gate structure 212. Thus,the source/drain regions 218 are also formed within the gap in thedevice isolation structures 208.

In some cases, a lightly doped region, which is often referred to asLDD, can be formed before sidewall spacers 216 are put into place. Forexample, to form a p-type source/drain region 218, a p-type LDD dopingprocess occurs before the sidewall spacers are formed. This LDD dopingprocess has a relatively light concentration of dopants. After thesidewall spacers have been formed, the main doping process occurs. Themain doping process involves a much higher concentration of p-typedopants than the LDD process.

The top view 202 illustrates the formation of the source/drain regions218 on both sides of the main gate structure 212 and within theextensions 214. Because the extensions 214 partially encompass theregion where the source/drain regions 218 are formed, they limit theformation of the source/drain regions 218 by blocking the ionimplantation doping process. This prevents the source/drain regions 218from being larger than intended and extending into the device isolationstructures 208.

Moreover, the source/drain regions 218 are not fully enclosed by thegate structure. Thus, various circuit elements may connect to thesource/drain regions 218 through a metal line. For example, a metal linemay be routed from either source/drain region 218 to another circuitelement such as another transistor or a resistor. Thus, more flexibilityin the circuit design is available.

FIG. 3 is a diagram showing further extensions of an I-shaped gatestructure. According to the present example, the extensions 214 of thegate structure 212 include further extensions 302. The furtherextensions 302 are such that the source/drain regions 218 are fullyenclosed except for a small gap 304. Thus, the formation of thesource/drain regions 218 is further limited. This can help reduce thechances that electric current flowing through the source/drain regions218 will leak into the photodiodes 210.

The gap 304 may be one of a variety of thicknesses. In one example, thethickness of the gap 204 is twice the thickness of the sidewall spacers216. Thus, the sidewall spacers 216 will effectively fill in the gap 304and the source/drain regions 218 will be completely encompassed and thusthe ion implantation doping process will be further limited. In someexamples, the gap 304 may be only wide enough to allow a metal line tobe routed between the further extensions 302 and connect with thesource/drain region 218.

FIG. 4 is a diagram showing an illustrative dummy gate structure. Insome cases, multiple transistors 402, 404 may be formed between twophotodiodes 210. In such cases, dummy gate structures may be placedbetween the gate structures 212 of each transistor 402, 404.Specifically, the dummy gate structure may be placed between a firsttransistor 402 and a second transistor 404. Both transistors 402, 404may have I-shaped gate structures 212 as illustrated. In some cases, thegate structures 212 may have different shapes that partially enclose thesource/drain regions 218.

The dummy gate structure 406 may also be made of polysilicon. The dummygate structure 406 may be made with the same mask that is used for formthe other gate structure 212 and extensions 214. In some examples, thedummy gate structure 406 may be biased. The biasing of the dummy gatemay help with the operation of the device isolation structures 208.

FIG. 5 is a flowchart showing an illustrative method for forming atransistor structure separated by device forming 502 device isolationstructures into a semiconductor substrate. The method further includes astep for forming 504 photo-sensitive devices into the device isolationstructures. The method further includes a step for forming 506 a gatestructure over the device isolation material, the gate structure havingextensions. The method further includes a step for 508 formingsource/drain regions on both sides of the gate structure, thesource/drain regions being formed in a gap in the device isolationstructure and being partially enclosed by the extensions of the gatestructure.

According to certain illustrative examples, a device including a gatestructure formed over a semiconductor substrate, the gate structurehaving extensions, a device isolation structure formed into thesemiconductor substrate adjacent the gate structure, wherein theextensions are over a portion of the device isolation structure, andsource/drain regions on both sides of the gate structure, thesource/drain regions being formed in a gap in the device isolationstructure and being partially enclosed by the extensions of the gatestructure.

According to certain illustrative examples, a method for forming atransistor device to be used in association with a photo-sensitivedevice includes forming device isolation structures into a semiconductorsubstrate, forming photo-sensitive devices into the device isolationstructures, forming a gate structure over the device isolation material,the gate structure having extensions over a portion of the deviceisolation structure, and forming source/drain regions on both sides ofthe gate structure, the source/drain regions being formed in a gap inthe device isolation structure and being partially enclosed by theextensions of the gate structure.

According to certain illustrative examples, a transistor device withinan array of photo-sensitive devices includes a device isolationstructure formed into a semiconductor substrate, photo-sensitive devicesbeing isolated by the device isolation structure, a gate structureformed over the semiconductor substrate, the gate structure havingextensions over a portion of the device isolation structure, a sidewallspacer formed on the sides of the gate structure, and source/drainregions on both sides of the gate structure, the source/drain regionsbeing formed in a gap in the device isolation structure and beingpartially enclosed by the extensions of the gate structure.

It is understood that various different combinations of the above-listedembodiments and steps can be used in various sequences or in parallel,and there is no particular step that is critical or required.Additionally, although the term “electrode” is used herein, it will berecognized that the term includes the concept of an “electrode contact.”Furthermore, features illustrated and discussed above with respect tosome embodiments can be combined with features illustrated and discussedabove with respect to other embodiments. Accordingly, all suchmodifications are intended to be included within the scope of thisinvention.

The foregoing has outlined features of several embodiments. Those ofordinary skill in the art should appreciate that they may readily usethe present disclosure as a basis for designing or modifying otherprocesses and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those of ordinary skill in the art should also realize that suchequivalent constructions do not depart from the spirit and scope of thepresent disclosure, and that they may make various changes,substitutions and alterations herein without departing from the spiritand scope of the present disclosure.

What is claimed is:
 1. A device comprising: a doped isolation regiondisposed within a substrate; a first gate structure disposed over thesubstrate; a first sidewall spacer disposed on the first gate structure,the first sidewall spacer including: a first portion extending from thefirst gate structure to a first portion of the doped isolation region; asecond portion extending from the first gate stack to a second portionof the doped isolation region; and a third portion extending from thefirst portion to the second portion of the first sidewall spacer; and afirst source/drain feature disposed within the substrate between thefirst portion and the second portion of the first sidewall spacer,wherein the doped isolation region extends within the substrate from thefirst portion to the second portion of the first sidewall spacer suchthat the first source/drain feature is at least partially surrounded bythe first portion, the second portion, the third portion and the dopedisolation region.
 2. The device of claim 1, wherein the first gatestructure includes: a body portion; a first extension extending from thebody portion to the first portion of the doped device isolation region;and a second extension extending from the body portion to the secondportion of the doped device isolation region.
 3. The device of claim 2,wherein the first portion of the first sidewall spacer interfaces withthe first extension, wherein the second portion of the first sidewallspacer interfaces with the second extension, and wherein the thirdportion of the first sidewall spacer interfaces with the body portion.4. The device of claim 1, wherein the first sidewall spacer furtherincludes a fourth portion extending from the first portion of the firstsidewall spacer disposed on the first portion of the doped isolationregion to the second portion of the first sidewall spacer disposed onthe second portion of the doped isolation region.
 5. The device of claim4, wherein the first source/drain feature is surrounded by the firstportion, the second portion, the third portion and the fourth portion ofthe first sidewall spacer.
 6. The device of claim 1, further comprising:a second gate structure disposed on the doped isolation region; a secondsidewall spacer disposed on the second gate structure, the secondsidewall spacer including: a fourth portion extending from the secondgate structure to a third portion of the doped isolation region; a fifthportion extending from the second gate stack to a fourth portion of thedoped isolation region; and a sixth portion extending from the firstportion to the second portion of the sidewall spacer; and a secondsource/drain feature disposed within the substrate between the fourthportion and the fifth portion of the sidewall spacer, wherein the dopedisolation region extends within the substrate from the third portion tothe fourth portion of the sidewall spacer such that the secondsource/drain feature is at least partially surrounded by the fourthportion, the fifth portion, the sixth portion and the doped isolationregion.
 7. The device of claim 6, further comprising: a photodiodedisposed in the substrate adjacent the first gate structure and thesecond gate structure; and a third gate stack disposed on the dopedisolation region, wherein the third gate stack is biased.
 8. A devicecomprising: a first source/drain feature disposed in a first region ofthe substrate; a doped isolation region disposed in the substrate aninterfacing with the first region of the substrate; and a gate structuredisposed over the substrate adjacent the first region of the substrateand interfacing with the doped isolation region, and wherein the firstregion of the substrate includes at least three sides and the firstregion is bounded on the at least the three sides by a combination ofthe gate structure and the doped isolation region.
 9. The device ofclaim 8, wherein the first region of the substrate includes four sidesand the first region is bounded on the four sides by a combination ofthe gate structure and the doped isolation region.
 10. The device ofclaim 8, further comprising a second source/drain feature disposed in asecond region of the substrate, the first region of the substrate beingon a first side of the gate structure and the second region of thesubstrate being on a second side of the gate structure that is oppositethe first side, and wherein the second region of the substrate includesat least three sides and the second region is bounded on the at leastthe three sides by a combination of the gate structure and the dopedisolation region.
 11. The device of claim 8, further comprising a firstphotodiode disposed in the substrate and interfacing with the dopedisolation region.
 12. The device of claim 11, further comprising asecond photodiode disposed in the substrate and interfacing the dopedisolation region, the first photodiode being disposed in the substrateon a first side of the gate structure and the second photodiode beingdisposed in the substrate on a second side of the gate structure that isopposite the first side.
 13. The device of claim 8, wherein the gatestructure includes: a body portion elongate along a first direction; afirst extension extending from the body portion and elongated in asecond direction that is substantially perpendicular to the firstdirection; and a second extension extending from the body portion andelongated in the second, and wherein the first source/drain feature isdisposed between the first extension and the second extension.
 14. Thedevice of claim 1, wherein the first region of the substrate includes aportion that is free of the first/source drain feature that ispositioned between the first source/drain feature and the dopedisolation region.
 15. A device comprising: a gate structure disposedover a substrate, wherein the gate structure includes: a body portionextending over the substrate; a first portion extending from the bodyportion in a first direction; a second portion extending away from thefirst portion in a second direction, the second portion having an endsurface; a third portion spaced apart from the first portion andextending from the body portion in the first direction; and a fourthportion extending away from the third portion in a third direction thatis opposite the second direction, the fourth portion having an endsurface facing the end surface of the second portion; and a dielectricsidewall spacer material disposed on the end surface of the secondportion and the end surface of the fourth portion such that thedielectric sidewall spacer material disposed on the end surface of thesecond portion merges with the dielectric sidewall spacer materialdisposed on the end surface of the fourth portion; and a firstsource/drain feature disposed in a first region of the semiconductorsubstrate, wherein the first region of the substrate is bounded by thefirst portion, the second portion, the third portion, the fourth portionand the dielectric sidewall spacer material.
 16. The device of claim 15,further comprising an isolation feature disposed in the substrate, andwherein at least a portion of the gate structure is disposed directly onthe isolation feature.
 17. The device of claim 16, wherein the isolationfeatures includes a doped region.
 18. The device of claim 15, whereinthe dielectric sidewall spacer material defines a opening exposing aportion of the first source/drain feature.
 19. The device of claim 15,further comprising a photodiode disposed in the substrate.
 20. Thedevice of claim 15, wherein the gate structure further includes: a fifthportion extending from the body portion in a fourth direction that isopposite the first direction; a sixth portion extending away from thefifth portion in the second direction; a seventh portion spaced apartfrom the fifth portion and extending from the body portion in the fourthdirection; and an eighth portion extending away from the seventh portionin the third direction, and wherein the device further includes a secondsource/drain feature disposed in a second region of the substrate,wherein the second region of the substrate is bounded by the fifthportion, the sixth portion, the seventh portion, the eighth portion andthe body portion of the gate structure.